Boron Trifluoride, BF₃ 

PDL
ppm

Method/Technique

Argon/Oxygen

0.05

GC-PDID

Nitrogen

0.05

GC-PDID

Carbon Monoxide

0.1

GC-AED

Methane

0.05

GC-AED

Hydrogen

0.05

GC-PDID

Sulfur Dioxide

2.0

SEMI C3.27-94 / FTIR

Carbon Dioxide

1 - 10

FTIR

SiF₄

10 - 100

SEMI C3.27-94 / FTIR

HF

1 - 10

FTIR

B 10 Isotope

100

FTIR

Water

0.5 - 2

FTIR

Sulfur Dioxide

2 - 10

SEMI C3.27-94 / FTIR

Argon

10

Mass Spectrometry

Oxygen

10

Mass Spectrometry

Nitrogen/CO

10

Mass Spectrometry

Fluorine

10

Mass Spectrometry

BF₂OH

100

Mass Spectrometry

Sulfur Dioxide

10

SEMI C3.27-94 / MS

SiF₄

10 - 100

SEMI C3.27-94 / MS