Hexafluoro-1,3-butadiene, C4F6 

CAS RN    685-63-2
Molecular Wt.   162.034
B.P.   6C
  
Component

PDL
ppm

Method/Technique
Nitrogen
0.05

GC-PDID
Argon/Oxygen
0.10

GC-PDID
CO
0.10

GC-PDID
Methane
0.10

GC-PDID
CO2
0.10

GC-PDID
CF4
0.0002

GC-PDID
Halocarbon Speciation
0.10

GC/MS, GC-AED
Index
Acetylene
Ammonia
Argon
Arsine
Boron Trichloride
Boron Trifluoride
Carbon Dioxide
Carbon Monoxide
Carbon Tetrafluoride
Chlorine
Deuterated Silane
Deuterium
Difluoroethane
Difluoromethane
Dichlorosilane
Ethylene
Germane
Germanium Tetrafluoride
Hexafluoro Ethane
Helium
Hexafluoro-1,3-butadiene
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulfide
Methane
Nitric Oxide
Nitrogen
Nitrogen Trifluoride
Octafluorcyclobutane
Oxygen
Phosphine
Propylene
Silane
Silicon Tetrafluoride
Sulfur Hexafluoride

 

Home | Laboratory | Air Monitoring | About Us |Contact Us

Copyright © 2011  Last modified: November 1, 2011
This web site is maintained by webmaster