Carbon Tetrafluoride, CF4 

CAS RN  75-73-0 
Molecular Wt. 88.005 
B.P. -128.0C 
Component

PDL
ppm

Method/Technique

Hydrogen

0.05

SEMI C 3.21-90

Nitrogen

0.05

SEMI C 3.21-91

Sulfur Hexafluoride

0.1

SEMI C 3.21-92

Carbon Monoxide

0.1

SEMI C 3.21-93

Carbon Dioxide

0.5

SEMI C 3.21-94
   

SEMI C 3.21-95

Oxygen

0.05

Galvanic Cell

Water

0.05

Hygrometer

Other CFCs

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GC/MS and GC-AED
Index
Acetylene
Ammonia
Argon
Arsine
Boron Trichloride
Boron Trifluoride
Carbon Dioxide
Carbon Monoxide
Carbon Tetrafluoride
Chlorine
Deuterated Silane
Deuterium
Difluoroethane
Difluoromethane
Dichlorosilane
Ethylene
Germane
Germanium Tetrafluoride
Hexafluoro Ethane
Helium
Hexafluoro-1,3-butadiene
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulfide
Methane
Nitric Oxide
Nitrogen
Nitrogen Trifluoride
Octafluorcyclobutane
Oxygen
Phosphine
Propylene
Silane
Silicon Tetrafluoride
Sulfur Hexafluoride

 

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