Dichlorosilane, SiCl2H2 

CAS RN  4109-96-0 
Molecular Wt. 100.99 
B.P. 8.2 
 
Component

PDL
ppm

Method/Technique

Hydrogen

0.1

GC-PDID or GC/MS

Nitrogen

0.1

GC-PDID or GC/MS

Argon

0.1

GC-PDID or GC/MS

Water

0.5 - 2

FTIR

HCl

0.5

FTIR

SiH3Cl

20

SEMI C 3.18-94/ GC-ICP-MS

SiHCl3

20

SEMI C 3.18-94/ GC-ICP-MS

SiCl4

20

SEMI C 3.18-94/ GC-ICP-MS
Index
Acetylene
Ammonia
Argon
Arsine
Boron Trichloride
Boron Trifluoride
Carbon Dioxide
Carbon Monoxide
Carbon Tetrafluoride
Chlorine
Deuterated Silane
Deuterium
Difluoroethane
Difluoromethane
Dichlorosilane
Ethylene
Germane
Germanium Tetrafluoride
Hexafluoro Ethane
Helium
Hexafluoro-1,3-butadiene
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulfide
Methane
Nitric Oxide
Nitrogen
Nitrogen Trifluoride
Octafluorcyclobutane
Oxygen
Phosphine
Propylene
Silane
Silicon Tetrafluoride
Sulfur Hexafluoride

 

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