Germanium Tetrafluoride , GeF4 

CAS RN    7783-58-6
Molecular Wt.   148.6
B.P.   Sublimes @ -37 C
  
Component

PDL
ppm

Method/Technique
Nitrogen
0.05

GC-PDID
Argon/Oxygen
0.10

GC-PDID
Carbon Dioxide
0.5

GC-PDID
Silicon Tetrafluoride
---
FTIR
HF
---
FTIR
Sulfur Dioxide
5
FTIR
Water
1.0
FTIR
Metals
---
ICP-MS
Index
Acetylene
Ammonia
Argon
Arsine
Boron Trichloride
Boron Trifluoride
Carbon Dioxide
Carbon Monoxide
Carbon Tetrafluoride
Chlorine
Deuterated Silane
Deuterium
Difluoroethane
Difluoromethane
Dichlorosilane
Ethylene
Germane
Germanium Tetrafluoride
Hexafluoro Ethane
Helium
Hexafluoro-1,3-butadiene
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulfide
Methane
Nitric Oxide
Nitrogen
Nitrogen Trifluoride
Octafluorcyclobutane
Oxygen
Phosphine
Propylene
Silane
Silicon Tetrafluoride
Sulfur Hexafluoride

 

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