Hydrogen Chloride, HCl 

CAS RN  7647-01-0 
Molecular Wt. 36.465 
B.P. -85 C 
 
Component

PDL
ppm

Method/Technique

Hydrogen

0.05

GC-PDID

Nitrogen

0.05

SEMI C 3.35-95 / GC-PDID

Argon/Oxygen

0.1

SEMI C 3.35-95 / GC-PDID

Carbon Dioxide

1

SEMI C 3.35-95 / FTIR

Methane

0.5

SEMI C 3.35-95 / FTIR

Acetylene

0.5

SEMI C 3.35-95 / FTIR

Water

0.5 - 2

SEMI C 3.35-95 / FTIR

Carbon Monoxide

1

FTIR
Index
Acetylene
Ammonia
Argon
Arsine
Boron Trichloride
Boron Trifluoride
Carbon Dioxide
Carbon Monoxide
Carbon Tetrafluoride
Chlorine
Deuterated Silane
Deuterium
Difluoroethane
Difluoromethane
Dichlorosilane
Ethylene
Germane
Germanium Tetrafluoride
Hexafluoro Ethane
Helium
Hexafluoro-1,3-butadiene
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulfide
Methane
Nitric Oxide
Nitrogen
Nitrogen Trifluoride
Octafluorcyclobutane
Oxygen
Phosphine
Propylene
Silane
Silicon Tetrafluoride
Sulfur Hexafluoride

 

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