Nitrogen Trifluoride, NF₃ 

PDL

ppm

Method/Technique

Hydrogen

0.05

SEMI C3.39-91 / GC-PDID

Nitrogen

0.1

SEMI C3.39-91 / GC-PDID

Argon/Oxygen

0.1

SEMI C3.39-91 / GC-PDID

Carbon Monoxide

0.1

SEMI C3.39-91 / GC-PDID

Carbon Tetrafluoride

1

SEMI C3.39-91 / GC-PDID

Carbon Dioxide

0.2

SEMI C3.39-91 / GC-PDID

Perfluoroethane

0.2

SEMI C3.39-91 / GC-PDID

Sulfur Hexafuoride

0.2

SEMI C3.39-91 / GC-PDID

Perfluoromethlyamine

0.2

GC-PDID

Sulfuryl Fluoride

0.5

GC-PDID

Water

0.1

SEMI C3.39-91 / FTIR

Hydrogen Fluoride

0.1

FTIR

Nitrogen Dioxide

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FTIR