Silicon Tetrafluoride, SiF4 

CAS RN  7783-61-1 
Molecular Wt. 32.1176 
B.P. -107.17 
 
Component

PDL

ppm

Method/Technique

Hydrogen

1

GC-PDID

Argon/Oxygen

1

GC-PDID

Nitrogen

1

GC-PDID

Carbon Monoxide

1

GC-PDID

Carbon Tetrafluoride

1

GC-PDID

Methane

----

FTIR

Carbon Dioxide

----

FTIR

Sulfur Hexafluoride

----

FTIR

Sulfur Dioxide

----

FTIR

Water

----

FTIR

HF

----

FTIR

HCl

----

FTIR
Metals
ppb levels
ICP-MS

 

 
Index
Acetylene
Ammonia
Argon
Arsine
Boron Trichloride
Boron Trifluoride
Carbon Dioxide
Carbon Monoxide
Carbon Tetrafluoride
Chlorine
Deuterated Silane
Deuterium
Difluoroethane
Difluoromethane
Dichlorosilane
Ethylene
Germane
Germanium Tetrafluoride
Hexafluoro Ethane
Helium
Hexafluoro-1,3-butadiene
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulfide
Methane
Nitric Oxide
Nitrogen
Nitrogen Trifluoride
Octafluorcyclobutane
Oxygen
Phosphine
Propylene
Silane
Silicon Tetrafluoride
Sulfur Hexafluoride

 

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