Deuterated Silane, SiD4 

CAS RN   
Molecular Wt.  
B.P.   
   
Component
PDL
ppm
Method/Technique
Nitrogen
0.1
 GC-PDID
Oxygen
0.1
GC-PDID  
Argon
0.1
GC-PDID  
Si2D6
0.1
GC-ICP-MS  
SeD2 ?
0.1
GC-ICP-MS  
Methyl Silane
0.1
GC-ICP-MS  
Ethyl Silane
0.1
GC-ICP-MS  
Phosphine
0.05
GC-ICP-MS  
AsD3
0.0002
GC-ICP-MS  
Germane
0.00005
GC-ICP-MS  
Hydrocarbons (each)
< 0.20
GC-PDID-GC-FID  





Index
Acetylene
Ammonia
Argon
Arsine
Boron Trichloride
Boron Trifluoride
Carbon Dioxide
Carbon Monoxide
Carbon Tetrafluoride
Chlorine
Deuterated Silane
Deuterium
Difluoroethane
Difluoromethane
Dichlorosilane
Ethylene
Germane
Germanium Tetrafluoride
Hexafluoro Ethane
Helium
Hexafluoro-1,3-butadiene
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulfide
Methane
Nitric Oxide
Nitrogen
Nitrogen Trifluoride
Octafluorcyclobutane
Oxygen
Phosphine
Propylene
Silane
Silicon Tetrafluoride
Sulfur Hexafluoride

 

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