Silane, SiH₄ 

PDL
ppm

Method/Technique

Argon/Oxygen

0.1

SEMI C3.10-95 / GC-PDID

Nitrogen

0.1

SEMI C3.10-95 / GC-PDID

Carbon Monoxide

0.1

SEMI C3.10-95 / GC-AED

Carbon Dioxide

0.1

FTIR

Methane

0.1

SEMI C3.10-95 / GC-AED

Hydrogen

0.1

SEMI C3.10-95 / GC-PDID

Arsine

0.002

GC-ICP-MS

Phosphine

0.02

GC-ICP-MS

Methyl Silane

0.1

SEMI C3.10-95 / GC/MS or

Disilane

0.1

GC-AED

Ethyl Silane

0.1

C₂-C₅ Hydrocarbons

0.1

SEMI C3.10-95 / GC-FID

Water

0.5 - 2

SEMI C3.10-95 / FTIR