Sulfur Hexafluoride, SF6 

CAS RN  2551-62-4 
Molecular Wt. 146.054 
B.P. -63.7 C 
 
Component

PDL
ppm

Method/Technique

Hydrogen

0.05

GC-PDID

Nitrogen

0.1

SEMI C3.24-95 / GC-PDID

Argon/Oxygen

0.1

GC-PDID

Carbon Monoxide

0.1

GC-PDID

Carbon Tetrafluoride

0.1

SEMI C3.24-95 / GC-PDID

Carbon Dioxide

0.2

GC-PDID

Nitrogen Trifluoride

0.2

GC-PDID

Water

0.1

SEMI C3.39-91 / Hygrometer

Hydrogen Fluoride

0.1

SEMI C3.39-91 / FTIR
Index
Acetylene
Ammonia
Argon
Arsine
Boron Trichloride
Boron Trifluoride
Carbon Dioxide
Carbon Monoxide
Carbon Tetrafluoride
Chlorine
Deuterated Silane
Deuterium
Difluoroethane
Difluoromethane
Dichlorosilane
Ethylene
Germane
Germanium Tetrafluoride
Hexafluoro Ethane
Helium
Hexafluoro-1,3-butadiene
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulfide
Methane
Nitric Oxide
Nitrogen
Nitrogen Trifluoride
Octafluorcyclobutane
Oxygen
Phosphine
Propylene
Silane
Silicon Tetrafluoride
Sulfur Hexafluoride

 

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